منابع مشابه
Microstructure evolution of Ti3SiC2 compound cathodes during reactive cathodic arc evaporation
The microstructure evolution and compositional variation of Ti3SiC2 cathode surfaces during reactive cathodic arc evaporation are presented for different process conditions. The results show that phase decomposition takes place in the near-surface region, resulting in a 5–50 m thick converted layer that is affected by the presence of nitrogen in the deposition chamber. This layer consists of tw...
متن کاملSynthesis and characterization of Cr–B–N coatings deposited by reactive arc evaporation
Nanocomposite Cr–B–N coatings were deposited from CrB0.2 compound targets by reactive arc evaporation using an Ar/N2 discharge at 500 °C and −20 V substrate bias. Elastic recoil detection (ERDA), x-ray photoelectron spectroscopy (XPS), x-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), and selected-area electron diffraction (SAED) were used to study the effect of...
متن کاملSilicon etch with chromium ions generated by a filtered or non-filtered cathodic arc discharge
The pre-treatment of substrate surfaces prior to deposition is important for the adhesion of physical vapour deposition coatings. This work investigates Si surfaces after the bombardment by energetic Cr ions which are created in cathodic arc discharges. The effect of the pre-treatment is analysed by X-ray diffraction, Rutherford backscattering spectroscopy, scanning electron microscopy and in-d...
متن کاملFiltered cathodic arc deposition with ion-species-selective bias.
A dual-cathode arc plasma source was combined with a computer-controlled bias amplifier to synchronize substrate bias with the pulsed production of plasma. In this way, bias can be applied in a material-selective way. The principle has been applied to the synthesis of metal-doped diamondlike carbon films, where the bias was applied and adjusted when the carbon plasma was condensing and the subs...
متن کاملImage quality in extended arc filtered digital tomosynthesis.
PURPOSE To study image quality in filtered digital tomosynthesis (FDTS) tomograms as a function of their reconstruction arc, using isocentrically acquired, fluoroscopic projection data. MATERIAL AND METHODS Both digital tomosynthesis (DTS) and cone beam CT (CBCT) reconstruction algorithms are based on backprojection and use cone beam projection data as input. Under limited angle conditions, C...
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ژورنال
عنوان ژورنال: Vacuum
سال: 2001
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(00)00425-5